| 摘要 |
PROBLEM TO BE SOLVED: To improve machining speed by dividing a laser beam into a plurality of numbers and simultaneously machining a plurality of works with a plurality of laser beams. SOLUTION: A laser beam from a laser beam oscillator 10 is divided into two in a cross sectional area by a 45 deg. reflecting mirror 11 and respectively guided to masks 13a, 13b. The laser beams pass through the hole specifying a via hole diameter with the masks 13a, 13b with throttling its beam diameter and one guided to X-Y scanners 14a, 14b. By oscillating the laser beams with the X-Y scanners 14a, 14b and focusing with machining lenses 15a, 15b, works 17a, 17b are irradiated with the laser beams. Work stages 16a, 16b move and position the works 17a, 17b on a plane. In using a reflecting mirror of a triangular pyramid shape having three reflecting faces or quadrangular pyramid shape having four reflecting faces, the laser beam is divided into three or four equal parts, and machining speed can further be increased. |
