| 摘要 |
PROBLEM TO BE SOLVED: To enable a process in which an extremely precise nozzle plate can be made simply by a method in which the nozzle plate, after being manufactured into two parts by injection molding using a plastic mold, is electrocast, after that, both parts of the nozzle plate are joined together. SOLUTION: To make the first part (filter texture part) 17 of a nozzle plate, an adhesion layer and a thermoplastic plastic layer are formed on a substrate of titanium, etc., and a filter texture 10 is formed by a photolithography method. The texture 10 is formed by electrocasting to form a forming tool 13, the tool 13 is formed by injection molding of plastic to form a plastic negative body, and after that, the first nozzle plate part 17 is formed by electrocasting. A tool for making the second nozzle part 18 is made by machining, and the second nozzle plate part 18 is formed similarly using the tool. Finally, both nozzle plate parts 17, 18 are joined together to finish a desired nozzle plate 30. |
