发明名称 |
Extraneous substance inspection apparatus for patterned wafer |
摘要 |
An extraneous substance inspection apparatus includes a level conversion circuit for converting a level of an extraneous substance detection signal obtained from a position in a first chip into one of multi-valued levels. A judging circuit determines the existence or absence of an extraneous substance by comparing a signal indicative of one of the multi-valued levels with another signal indicative of a converted level obtained by converting a detection signal detected at a similar position in another chip adjacent to the first chip.
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申请公布号 |
US5724132(A) |
申请公布日期 |
1998.03.03 |
申请号 |
US19960736582 |
申请日期 |
1996.10.24 |
申请人 |
HITACHI ELECTRONICS ENGINEERING CO., LTD. |
发明人 |
MORISHIGE, YOSHIO;NAKAMURA, HISATO;WATANABE, TETSUYA |
分类号 |
G01R31/311;H01L21/66;(IPC1-7):G01N21/00 |
主分类号 |
G01R31/311 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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