VAPOR DEPOSITION SOURCE OF VAPOR DEPOSITION DEVICE,申请号JP19960213480-传众专利搜索

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发明名称	VAPOR DEPOSITION SOURCE OF VAPOR DEPOSITION DEVICE
摘要
申请公布号	JPH1059797(A)	申请公布日期	1998.03.03
申请号	JP19960213480	申请日期	1996.08.13
申请人	ANELVA CORP	发明人	YOKOYAMA SHUICHI
分类号	C30B23/08;C30B35/00;H01L21/203;(IPC1-7):C30B23/08	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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