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经营范围
发明名称
SPIN COATING DEVICE
摘要
申请公布号
JPH1057876(A)
申请公布日期
1998.03.03
申请号
JP19960238345
申请日期
1996.08.21
申请人
MIYAZAKI OKI ELECTRIC CO LTD;OKI ELECTRIC IND CO LTD
发明人
ITO YOSHIZUMI;FUKUMOTO TOSHIHIRO
分类号
B05C11/08;H01L21/027;(IPC1-7):B05C11/08
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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