发明名称 STORAGE AND DELIVERY SYSTEM FOR GASEOUS COMPOUNDS.
摘要 <p>An adsorption-desorption apparatus (102), and process for storage and dispensing of a gas, e.g., hydride and halide gases, and organometallic Group V compounds, which is selectively dispensed by pressure differential desorption of the sorbate gas from the sorbent material. The sorbent material is preferably a material which is devoid of concentration of trace components such as water, metals and oxidic transition metal species which would significantly decompose the sorbate gas in apparatus (102).</p>
申请公布号 MX9702722(A) 申请公布日期 1998.02.28
申请号 MX19970002722 申请日期 1995.10.13
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 GLENN M. TOM;JAMES Y. MCMANUS
分类号 B01D53/04;B01J4/02;B01J20/18;B01J20/20;F17C11/00;(IPC1-7):B01D53/04 主分类号 B01D53/04
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