Producing stable corona discharge for production of ozone from air, sulphur di:oxide oxidation, dust removal from air, nitride and sputtering processes

摘要

A process and assembly generate a stable corona discharge within a reactor(1) with pref. a symmetrical electrode arrangement consisting of a first (2) and second (3) electrode, between which (4) a homogenous electrical field can build up within a gas. The field (4) is generated by the application to the electrodes (2, 3) of direct current in the form of high-frequency impulses of very short endurance. The novelty is that the corona discharge (volume discharge) extending through the entire volume of the space between (4) the electrodes (2, 3) is achieved by a the application of an electrical current with the following characteristics: (a) an amplitude of from 4 to 70 kV; (b) an impulse repeat frequency of from 0.1 to 500 kHz; (c) an impulse incremental period of from 0.1 to 500 ns; (c) and an impulse endurance of from 0.1 to 10 epsilon s; (d) also claimed is an associated process for the production of ozone.