发明名称 |
ACHROMATIC LENS SYSTEM FOR ULTRAVIOLET RADIATION WITH GERMANIUM DIOXIDE GLASS |
摘要 |
An achromatic product, in particular for uses in the DUV range below 350 nm wavelength, and therefore in particular for projection exposure systems for microlithography, combines quartz glass with lenses made of germanium dioxide glass (GeO2). The production of GeO2 glass by CVD on an amorphous base plate made of the same material is disclosed. |
申请公布号 |
WO9807666(A2) |
申请公布日期 |
1998.02.26 |
申请号 |
WO1997EP04468 |
申请日期 |
1997.08.15 |
申请人 |
CARL ZEISS;CARL-ZEISS-STIFTUNG HANDELND ALS CARL ZEISS;SCHUSTER, KARL, HEINZ |
发明人 |
SCHUSTER, KARL, HEINZ |
分类号 |
G02B13/14;C03B8/00;C03C3/253;G02B1/02 |
主分类号 |
G02B13/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|