Verfahren und Einrichtung zur Herstellung von ultrareinem Stickstoff

摘要

Process for the preparation of ultra-pure nitrogen with an impurities content lower than 100 ppb (parts per billion), characterised in that at least the impurities consisting of carbon monoxide (CO) and/or hydrogen (H2) are removed by passing the gas to be purified from at least one of these two constituents over a bed of particles incorporating a copper (Cu) and/or ruthenium (Ru) and/or rhodium (Rh) and/or palladium (Pd) and/or osmium (Os) and/or iridium (Ir) and/or platinum (Pt) metal element supported on a particulate support according to the ion exchange technique and/or according to the impregnation technique. …This technique makes it possible to obtain ultra-pure nitrogen by applying it either to distilled nitrogen or to air to be distilled to complement the trapping of CO2 and H2O. An apparatus for the implementation of the process is another subject of the invention.