| 发明名称 |
Support frame for semiconductor wafer |
| 摘要 |
The support frame (1) supports the semiconductor disc in a processing machine, with different measurements at different points for matching the design of different processing machines. Pref. the support frame is circular, with pairs of diametrically opposing surfaces (11,12,13,14) around its periphery, providing different frame widths matched to different processing machines, the correct width selected in dependence on the insertion direction of the support frame.
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| 申请公布号 |
DE19633927(A1) |
申请公布日期 |
1998.02.26 |
| 申请号 |
DE19961033927 |
申请日期 |
1996.08.22 |
| 申请人 |
SIEMENS AG, 80333 MUENCHEN, DE |
发明人 |
LOESCH, HARALD, DIPL.-ING. (FH), 93077 BAD ABBACH, DE;FISCHBACH, REINHARD, DIPL.-ING. (FH), 93049 REGENSBURG, DE |
| 分类号 |
H01L21/68;(IPC1-7):H01L21/68;H01L21/58 |
主分类号 |
H01L21/68 |
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