| 发明名称 |
METHOD AND DEVICE FOR WASHING ELECTRONIC PARTS MEMBER, OR THE LIKE |
| 摘要 |
An electronic parts member, or the like, such as the silicon wafer, etc., is washed with wash water. The wash water is prepared by dissolving a hydrogen gas or ozone gas in ultra pure water and has a negative or positive oxidation-reduction potential. This wash water has remarkably improved detergency for electronic parts. In addition, when the pH of the wash water is adjusted, the electronic parts member can be washed more effectively. |
| 申请公布号 |
WO9808248(A1) |
申请公布日期 |
1998.02.26 |
| 申请号 |
WO1997JP02852 |
申请日期 |
1997.08.19 |
| 申请人 |
ORGANO CORPORATION;FRONTEC INCORPORATED;IMAOKA, TAKASHI;YAMASHITA, YUKINARI |
发明人 |
IMAOKA, TAKASHI;YAMASHITA, YUKINARI |
| 分类号 |
B08B3/08;B08B3/12;C02F1/20;C02F1/66;C02F1/70;H01L21/304;H01L21/306;(IPC1-7):H01L21/304 |
主分类号 |
B08B3/08 |
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