发明名称 Abrasive shaped article comprising silica
摘要 An abrasive shaped article composed of at least 90% by weight, based on the weight of the abrasive shaped article, of silica and having a bulk density of 0.2 g/cm 3 to 1.5 g/cm 3 , a BET specific surface area of 10 m 2 /g to 400 m 2 /g and an average particle diameter of 0.001 ~m to 0.5 ~m. An abrasive disc having fitted thereto at least one of the abrasive shaped article is advantageously used for polishing a material such as substrate. Preferably at least two kinds of abrasive shaped articles are fitted to the supporting auxiliary, at least one kind of which has a bulk density of 0.7 g/cm 3 to 1.5 g/cm 3 and at least one kind of which has a bulk density of at least 0.2 g/cm 3 but smaller than 0.7 g/cm 3 .
申请公布号 GB2316414(A) 申请公布日期 1998.02.25
申请号 GB19970016107 申请日期 1997.07.30
申请人 * TOSOH CORPORATION 发明人 HIDETO * KURAMOCHI;YOSHITAKA * KUBOTA
分类号 B24B37/11;B24B37/24;B24B37/26;B24D3/00;B24D11/00;C09K3/14;(IPC1-7):B24D3/00 主分类号 B24B37/11
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