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发明名称
Wafer holder
摘要
申请公布号
EP0663685(B1)
申请公布日期
1998.02.25
申请号
EP19940309602
申请日期
1994.12.21
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
UCHIYAMA, ISAO;KUDO, HIDEO
分类号
B65G49/07;H01L21/00;H01L21/304;H01L21/67;H01L21/683;(IPC1-7):H01L21/00
主分类号
B65G49/07
代理机构
代理人
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