DEVICE FOR VAPOUR-DEPOSITING A MATERIAL ON HIGH SURFACE AREA SUBSTRATES,申请号EP19960915075-传众专利搜索

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发明名称	DEVICE FOR VAPOUR-DEPOSITING A MATERIAL ON HIGH SURFACE AREA SUBSTRATES
摘要
申请公布号	EP0824603(A1)	申请公布日期	1998.02.25
申请号	EP19960915075	申请日期	1996.04.23
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	IDA, MICHEL;PERRIN, AIME;BOREL, MICHEL;CHARLES, RAYMOND
分类号	C23C14/24;C23C14/50;H01J9/02;(IPC1-7):C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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