| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device in which the effect of signal noise is reduced.SOLUTION: The sensor device comprises: a sensor element 30 equipped with a detection electrode, a base 20 including a detection signal wiring 26a electrically connected to the detection electrode and a digital signal wiring 26b for transmitting a digital signal, a lid joined to the base 20, an electronic component 40 disposed between the base 20 and the lid and equipped with a digital signal terminal 46b, and a metal element 60 disposed between the base 20 and the lid and electrically connected to constant potential. The metal element 60 is disposed, in a plan view of the base 20, between the detection signal wiring 26a and the digital signal wiring 26b.SELECTED DRAWING: Figure 1 |
