| 摘要 |
PROBLEM TO BE SOLVED: To securely hold wafers in a wafer cassette so as not to make them move about. SOLUTION: A wafer cassette is equipped with an outer case 20 and a holder 30 provided with holding grooves 31 parallel with each other, and a column 40 which is located closer to an insertion/drawing surface 23a than to the holder 30 extending vertical to a direction A in which a wafer W is inserted in or drawn out is set movable in a vertical direction B, when a projection 41 is aligned with the holding grooves 31, the wafer W is prevented from being drawn out from the holding groove 31, and when a recess 42 is aligned with the holding grooves 31, the recess 42 allows the wafer W to be inserted in or drawn out from the groove 31. |
