| 摘要 |
PROBLEM TO BE SOLVED: To make the polarity of a photoresist reversible by activating a 2nd photosensitive blend so that a 1st reaction is canceled. SOLUTION: A photoresist device contains a 1st photosensitive blend which is activated at a 1st characteristic value and causes a 1st reaction and a 2nd photosensitive blend which is activated at a 2nd characteristic value so that the 1st reaction is canceled. In the photoresist device, a negative photosensitive component contained in a photoresist layer 32 is activated with exposure energy having a higher energy level than an energy level E2 and a positive photosensitive component contained in the layer 32 is activated at an energy level between an energy level E1 and the energy level E2. |
