Manufacturing method for silicon nitride-based sintered body

摘要

The invention aims to offer a method to manufacture a high-strength, high-reliability and low cost silicon nitride based sintered body which is not affected by the amount of metal impurities contained in the silicon nitride powder, without using high-purity silicon nitride powder, and can be sintered for a short sintering time. The invention uses silicon nitride and sintering aids, and the powder mixture containing 500-5000 ppm metal impurities is sintered at temperatures ranging from 1300 DEG -1900 DEG C., and under the conditions wherein the product of sintering temperature and sintering time ranges from 1x105 to 10x105 DEG C. xseconds.