| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a dicing device, wherein the good or bad of a dressing of a blade and a correction of run out of the blade can be quantitatively decided and the decision can be made in a short time. SOLUTION: When a dressing of a blade using a dresser ends (S1 and S2), a detection signal of a blade run out confirming sensor is read in (S3). This detection signal includes information, which serves as an indication to show the extent of correction of run out of the blade and the finish of the dressing of the blade. There, the maximum value Vmax of the indication is found from the detection signal and this found maximum value Vmax is compared (S4 and S5) with a threshold value Vs which is previously set. As the result of the comparison, in the case where the maximum value Vmax is smaller than the threshold value Vs, the state of the dressing is decided [good] and is displayed (S6 and S7), while in the case where the maximum value Vmax is larger than the threshold value Vs, the state of the dressing is decided [bad] and is displayed and thereafter (S8 and S9), the above step returns again to the step 1 to perform the dressing and thereafter, the above continuous processing is executed.</p> |
