| 摘要 |
PROBLEM TO BE SOLVED: To stably oscillate a piezoelectric body with a suitable amplitude by an impressed voltage of controllable size, by impressing the voltage so that one of a pair of piezoelectric bodies constituting the composite piezoelectric body supporting a cantilever is expanded and the other piezoelectric body is shrunk. SOLUTION: A supporting member 26 fixed to a main body of an atomic force microscope supports an oscillation-impressing composite piezoelectric body 27. The composite piezoelectric body 27 is composed of two piezoelectric bodies having polarization directions opposite to each other. A cantilever 8 is supported to a cantilever-supporting part 27b of the piezoelectric body. A voltage is impressed so that one of the piezoelectric bodies of the composite piezoelectric body 27 is expanded in a direction perpendicular to a bonded face and the other is shrunk. Accordingly, shift amounts of the piezoelectric bodies are offset and a sensitivity of the composite piezoelectric body 27 becomes smaller than that of the individual piezoelectric body. Since the voltage to be impressed to the piezoelectric body 27 can be large if the sensitivity is reduced, a voltage amplitude can be controlled more easily and the composite piezoelectric body 27 can be oscillated stably. |
