| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical disk master disk recorder capable of forming a minute size pit on a recording surface of an optical disk master disk and manufacturing the optical disk master disk recording high density information. SOLUTION: This recorder is constituted so that an electronic beam excited in a vacuum state chamber 8 is high speed deflected, and an anode rotary type X-ray tube 12 is irradiated by the beam, and X-rays generated in the anode rotary type X-ray tube 12 are converged by a Fresnel lens 16, and are passed through the chamber 19 of a high purity He atmosphere to make them arrive at an X-ray mask 17 supported by a dynamic pressure type slider 18. The dynamic pressure type slider 18 uses dynamic pressure by the rotation of the optical disk master disk 1, and holds a gap between the X-ray mask 17 and the optical disk master disk 1 to a minute gap, and forms a minute pit of 0.15μm or below on the optical disk master disk 1 by the high intensity X-rays high speed deflected and irradiated from the X-ray mask 17. |
