| 摘要 |
PROBLEM TO BE SOLVED: To realize a wafer ID reader which is capable of reading the ID of a wafer at a high speed. SOLUTION: A wafer ID reader is composed of a wafer cassette 2 which houses semiconductor wafers 1 with edge faces 1a where a wafer ID is provided respectively, an ID detector 3 which reads a wafer ID formed on the edge face 1a of the semiconductor wafer 1 without pulling the wafer 1 out of the cassette 2, a recognition section 4 which recognizes a semiconductor wafer 1 which is subjected to processing such as inspection or the like basing on a detection result of the ID detector 3, a cassette elevator 5 which supports the wafer cassette 2a, an elevator drive motor 6 which moves up or down the cassette elevator 5, and a control 7 which controls the drive of the elevator drive motor 6. By this setup, the wafer ID of the semiconductor wafer 1 housed in the wafer cassette 2 can be read in by a wafer ID reader without pulling the wafer 1 out of the cassette 2. |
