| 摘要 |
PROBLEM TO BE SOLVED: To provide an orientation treatment method capable of suppressing the generation of particles and generating a relatively large pretilt angle by irradiating a perpendicularly oriented film with an ion beam in vacuum by specifying the irradiation angle with the oriented film surface. SOLUTION: A vacuum vessel is internally provided with a holder 8 for holding a substrate 2 with the oriented film to be subjected to the orientation treatment. This holder 8 is made rotatable like an arrow A around a revolving shaft 10 in such a manner that the irradiation angleϕof the ion beam 14 with the surface of the perpendicularly oriented film 6 may be changed. The irradiation angleϕof below 90 deg. is basically satisfactory but if the angleϕis too large, the effect of cutting the side chains of a high polymer constituting the oriented film 6 is small and the pretilt angle cannot be made small for the beam current density and acceleration energy and, therefore, the treatment efficiency is poor. If the angleϕis too small, the effect of sputtering the surface of the oriented film 6 is excessively so high that the surface roughens. Then, the angleϕis preferably in a range of 20 to 60 deg.. |
