CHARGED PARTICLE BEAM DEVICE,申请号JP19970147545-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH1055773(A)	申请公布日期	1998.02.24
申请号	JP19970147545	申请日期	1997.06.05
申请人	HITACHI LTD	发明人	OTAKA TADASHI;ICHIHASHI MIKIO
分类号	H01J37/073;H01J37/16;H01J37/18;H01J41/12;(IPC1-7):H01J37/18	主分类号	H01J37/073
代理机构		代理人
主权项
地址

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