| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for fabricating a photovoltaic element which is high in its photoelectric conversion rate and which has a reflective layer with a high reflectance factor and high reliability. SOLUTION: In the method for fabricating a photovoltaic element wherein a reflective layer is provided on a substrate and at least a transparent conductive layer, a semiconductor layer and a transparent electrode layer are provided on the reflective layer; the reflective layer is formed by using a metal and/or a metal-contained substance as a target 208, supplying a sputtering gas into a vacuum container 201, and applying a varying bias DC voltage (power source 207) to a substrate 94 for sputtering. |
