| 摘要 |
PROBLEM TO BE SOLVED: To obtain a stable high inductance, low equivalent resistance and good performance coefficient by forming a magnetic film of specified thickness, specifying the aspect ratio of coil conductors or holding a specified relation between the coil conductor width to the spacing between the conductors. SOLUTION: The magnetic film 3 is pref. a film of 0.5-8μm thick. If t and a are thickness and width of a coil conductor 6 of a coil, its aspect ratio t/a pref. meets 0.035<=t/a<=0.35. If b is a spacing between the adjacent coil conductors 6 of the coil pattern, the proportion of the coil conductor, a/(a+b), is pref. 0.2<=a/(a+b). Satisfying this relation makes it possible to obtain a stable high inductance, low equivalent resistance and good performance coefficient.
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