| 摘要 |
PROBLEM TO BE SOLVED: To contribute to improve cutting accuracy, quality and yield of a manufactured wafer-like article by using abrasive grain with a mean particle diameter of a specified range as the abrasive grain incorporated in a slurry. SOLUTION: A premix apparatus 34 comprises a feeding inlet 37 for feeding abrasive grain and oil into a prestorage tank 30, the prestorage tank 30 wherein a slurry 60 prepd. by dispersing uniformly the abrasive grain into oil in advance by stirring and mixing is stored, a stirrer 32 for stirring the abrasive grain and the oil fed in the prestorage tank 30, a liq. transferring pipe 25 for feeding the slurry into a storage tank 22 and a feeding valve 36 for the slurry. A slurry 60 prepd. by feeding the ibrasive grain with a mean particle diameter 13-15μm and the oil by a mixing ratio of the abrasive grain to the oil of about 1:1.25 into the premix apparatus 34 and stirring and mixing them, is fed into the storage tank 22 and then, a silicon ingot is cut by using a wire 6 while the slurry 60 is jetted from liq. jetting nozzles 18 and 19 by means of a liq. feeding pump 26. |
