发明名称 Laser diode for optoelectronic integrated circuit and a process for preparing the same
摘要 The present invention relates to a laser diode for optoelectronic integrated circuit, more specifically, to a laser diode for optoelectronic integrated circuit with a rooftop reflector which can be operated by means of a low driving current and a process for preparing the same. A laser diode for optoelectronic integrated circuit of the present invention comprises: a substrate; a waveguide consisting of a N-cladding layer and a passive waveguide layer, which is positioned on the substrate; an active waveguide with a rooftop reflector, which is positioned on the waveguide and has an epitaxial layer of a separating layer, an active layer, a P-cladding layer and a p-ohmic layer; SiO2 layer with a linear contact opening which is positioned on the active waveguide; an upper metal contact layer which is positioned on the SiO2 layer; and, a lower metal contact layer which is positioned under the substrate. The laser diode for optoelectronic integrated circuit of the present invention has a high efficiency of utilization of light and a low threshold current, to make the laser diode operational by means of a low driving current.
申请公布号 US5721750(A) 申请公布日期 1998.02.24
申请号 US19960631773 申请日期 1996.04.12
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 KWON, YOUNG-SE;JI, JEONG-KEUN
分类号 H01S5/026;H01S5/10;(IPC1-7):H01S3/19;H01L21/20 主分类号 H01S5/026
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