| 摘要 |
PROBLEM TO BE SOLVED: To provide a deformable mirror capable of precisely deforming a mirror surface, holding it, improving a deformability and consequently reducing energy required for elastic deformation. SOLUTION: This deformable mirror 1 is provided with a flexible member 2 having a reflection surface reflecting incident light on its surface and a reference surface substrate arranged opposite to the rear surface of the flexible member, having a flat part 34 sticking to the outer peripheral part of the flexible member 2 and supporting it on the outer peripheral part and having a rugged surface 3 forming a space allowing the elastic deformation of the flexible member 2 on the inside of the flat part 34. In such a case, the height of the central part 35 of the sectional shape of the rugged surface 3 is set in the height or below of the flat part 34. |
