| 摘要 |
<p>PROBLEM TO BE SOLVED: To impart a thin board holder with in abrasive resistance function and anti-static measures. SOLUTION: A wafer carrier 1 is capable of supporting a large number of wafers at the same time, wherein a function thin film 15 is formed on all or a part of the surface of the wafer carrier main body. The function thin film 15 is formed of one or more elements selected out of Si, Ti, Sn, In, Al, Au, Ag, Cu, Sb, W, Ge, PPV or PPP. By this constitution, the wafer carrier 1 formed of single material can be given several functions.</p> |
