| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method for a surface conductive type electron emitting element capable of accurately forming the position and shape of an electron emitting part, reducing the dispersion of characteristics of elements, enlarging the area of an image forming device, and enhancing quality. SOLUTION: In the manufacture of a surface conductive type electron emitting device in which an electron emitting part 5 is formed in a conductive film 4 across a pair of element electrodes 2, 3 formed on a substrate, an insulating thin film 6 is formed on a glass substrate 1 containing an alkali component. A pair of electrodes 2, 3, and wiring are formed on the insulating thin film 6. A narrow crack 7 is formed on the insulating thin film 6. The conductive film 4 covering the crack 7 is formed across the electrodes 2, 3. The place except for the electron emitting part forming region is reduced, then by passing electricity, the electron emitting part 5 is formed in the conductive film 4.</p> |
