ACTIVE MATRIX SUBSTRATE AND ITS PRODUCTION AS WELL AS LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To lower the loss of the driving voltage to be impressed on liquid crystals and to prevent the deterioration with metallic electrodes by arranging pixel electrodes and counter electrodes in parallel via protective insulating films on source electrodes and common wirings. SOLUTION: A Cr film is formed and is worked to drain wirings 7 and source electrodes 8. The n(+)a-Si films in channel parts are thereafter are removed. The protective insulating films 9 (SiN) are formed thereon. Contact holes 10 arriving at the source electrodes 8 and the common wirings 3 are formed on the gate insulating films 4 and the SiN of the protective insulating films 9 by forming the contact holes of drain wiring terminal parts, gate wiring terminal parts and drain wiring terminal parts. Then, a crystalline ITO film is then formed. This ITO film is worked to form the pixel electrodes 11, counter electrodes 12, the drain wiring terminal parts, the gate wiring terminal parts and the drain wiring terminal parts. The pixel electrodes 11 and the counter electrodes 12 are arranged in parallel via the protective insulating films 9 on the source electrodes 8 and the common wiring 3.