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发明名称	EPITAXIAL GROWTH DEVICE
摘要
申请公布号	JPH1050613(A)	申请公布日期	1998.02.20
申请号	JP19960200153	申请日期	1996.07.30
申请人	SONY CORP	发明人	NOGUCHI OSAMU
分类号	C30B25/12;C23C16/44;C23C16/455;H01L21/20;H01L21/205;(IPC1-7):H01L21/205	主分类号	C30B25/12
代理机构		代理人
主权项
地址

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