| 摘要 |
PROBLEM TO BE SOLVED: To easily grasp a pellicle frame or a mask protecting device from a distant place and to prevent contamination by providing a frame with handles so that the frame can be caught by mechanical hands. SOLUTION: The both sides of a pellicle frame 5 are provided with wide handles 6. The handles are required to have only a function to be caught by mechanical hands, and therefore, such accuracy as required for processing or production of insertion holes or fine grooves on a pellicle frame 5 is not required for the handle. Otherwise, accurate control of tools to engage insertion holes or fine grooves is not required. The pellicle frame 5 can be grasp and held on both sides or one side. The only function required for the handle is that the handle can be grasp from one side, and therefore, the structure is simple and the automatic production line can be made more compact. By supporting the pellicle frame with engaged handles on the mount placed at a specified distance on a conveyer, the pellicle frame 5 or a mask protecting device can be carried in a noncontact state from the conveyer so that contamination by the belt can be prevented. |
