| 摘要 |
Disclosed is a throttle valve used in fluid flow control of a semiconductor process facility. The disclosed throttle valve comprises: a ring type flange; a flapper which is installed to be able to be angle-adjusted to open or close an aperture in the flange; a motor housing arranged outside the flange; a motor which is arranged in the motor housing, and provides driving force for the flapper to adjust an angle as to the flange; a circuit board for power supply which is arranged at one side of the motor in the motor housing, and has a circuit formed to supply electricity to the motor; a circuit board for signal processing which is arranged at another side of the motor in the motor housing, and has a circuit formed to process a signal; a circuit board for communications which is electrically connected to the circuit board for power supply and the circuit board for signal processing while being arranged at a lower side of the motor in the motor housing, and has a circuit formed to support data communications; an interface circuit board which is arranged in the motor housing, and is connected to the circuit board for power supply, the circuit board for signal processing and the circuit board for communications; and at least one heat dissipation fan which is arranged in the motor housing, and prevents overheating in the motor housing. |
