| 摘要 |
PROBLEM TO BE SOLVED: To enhance maintainability of a probe card by employing a detachable structure at the probe part touching the electrode of a semiconductor integrated circuit. SOLUTION: The probe card comprises a gold plated wiring pattern 12, a wiring 13, various elements 14, socket pins 15, a resin probe block 16, a probe guide 17, and a tungsten probe 18 provided on the body substrate 11. The probe block 16 is fixed by means of screws to the body substrate 11 so that it can be removed therefrom and positioned easily. At the time of replacing the probe 18, the probe block 16 is removed from the body substrate 11 and then a positioning plate is removed together with the probe guide 17. An old probe 18 is then removed from the probe block 16 and a new probe 18 is fixed in reverse order thus completing replacement. Consequently, the forward end of the probe 18 can be aligned with the bonding pad of an IC chip by simply inserting the forward end of the probe 18 into the positioning plate without requiring any special technology or experience. |
