PHOTOELECTRIC CONVERSION ELEMENT AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To simply form 1st and 2nd electrodes used to extract an electric output by photoelectric conversion of the photoelectric conversion element on the same plane of the element. SOLUTION: A separate groove 31 with a depth up to a semiconductor region 11 penetrated through a junction forming layer 21 formed on the semiconductor region 11 is formed, and the junction forming layer 21 is divided into an effective region 21a and an ineffective region 21b. A 1st electrode forming groove 32 with a depth up to the semiconductor region 11 penetrated through the ineffective region 21b is formed to the ineffective region 21b. A 1st electrode in electric continuity to the semiconductor region 11 via the 1st electrode forming groove 32 is formed to the region 11 and a 2nd electrode 42 is formed on the surface of the effective region 21a.