| 摘要 |
PROBLEM TO BE SOLVED: To accurately inspect the center position of an electrode by reducing the influence of shading and the like generated by the ruggedness of the electrode surface of an electronic component and the lighting condition of the electrode by statistical process. SOLUTION: After roughly inspecting the position of an electrode (step 1), an edge point on the opposing side whereupon the electrode exists is obtained (step 2), and a two-dimensional coordinate axes for projection are so defined that the deflection angle of the electrode is zero (step 3). The center position of the two edge points, one selected from one side, is found (step 4), projection on the axis, which orthogonally intersects the above side among the coordinate axes for projection, is repeated, a histogram at the center position on the axis is created, and a line which passes the peak position of the histogram is permitted to be the center line of the electrode (step 7). Then, for the other side, the center line of the electrode is obtained in the same manner, and the intersection of the two center lines is permitted to be the center of the electrode (step 9). |
