| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanning two-dimensional concentration distribution measuring apparatus by which the true state of a sample to be measured can be verified even when a flaw or an irregularity is generated on a sensor face and by which a very small time-dependent change can be grasped surely. SOLUTION: An optical scanning two-dimensional concentration distribution measuring apparatus is constituted in such a way that a sensor face 7 is provided on one face of a semiconductor substrate 5 and that the semiconductor substrate 5 is irradiated with probe light 3. In the measuring apparatus, when a sample 9 is not installed so as to come into contact with the sensor face 7 and when the sample is installed so as to come into contact with the sensor face, data at the start of a measurement is acquired as initial data, and the initial data is subtracted from measured data after the passage of a certain time from the shaft of the measurement. |
