发明名称 PIEZOELECTRIC VIBRATION GYRO USING ENERGY CONFINING VIBRATION MODE
摘要 PROBLEM TO BE SOLVED: To provide a small-sized and thinned piezoelectric vibration gyro constructed on a substrate comprising a vibration gyro for a drive circuit and a detection circuit and capable of connecting an input and output terminal without a lead wire. SOLUTION: In a piezoelectric vibration gyro using an energy confining vibration mode, at a position of each apex constructing a substantial isosceles triangle of a substantial center part on one main face of a piezoelectric plate 1 having a polarizing axis in a thickness direction, first, second and third electrodes 11, 12, 13 are formed, and the first electrode 11 is arranged at a position of a vertical angle and the second and third electrodes 12, 13 are respectively arranged at a position of a base angle, and the first electrode 11 is grounded, and an exciting drive voltage is applied to the second and third electrodes 12, 13 via a resistor, respectively, and by operations of a Coriolis force caused when the piezoelectric plate 1 is rotated round an axis perpendicular to the main face, a difference between voltages caused in the second and third electrodes 12, 13 is detected.
申请公布号 JPH1047967(A) 申请公布日期 1998.02.20
申请号 JP19960204947 申请日期 1996.08.02
申请人 TOKIN CORP 发明人 YOSHIDA TETSUO;WAKAO NAOKI;WATANABE HIROSHI
分类号 G01P9/04;G01C19/56;H03H9/17 主分类号 G01P9/04
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