METHOD AND APPARATUS FOR PLASMA TREATMENT,申请号JP19960199388-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PLASMA TREATMENT
摘要
申请公布号	JPH1050664(A)	申请公布日期	1998.02.20
申请号	JP19960199388	申请日期	1996.07.29
申请人	FUJITSU LTD	发明人	KOMURO GENICHI
分类号	C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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