| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor element and an angular velocity detector which detects an angular velocity with high sensitivity and high reliability by a fork-shaped crystal member. SOLUTION: An angular velocity sensor element comprising a fork-shaped crystal member 1; drive electrodes 2a to 2h; a pair of detection electrodes 3a, 3b and a pair of detection electrodes 3c, 3d which are respectively arranged in symmetrical positions to a center line of external side electrodes 2b, 2f among the drive electrodes. When an angular velocity is applied to an element during bending vibrations in an X-axial direction by drive from the drive electrodes 2a to 2h and new bending vibrations in a Z-axial direction occurs, the bending vibrations in the Z-axial direction are respectively detected by detection electrodes. These detection electrodes 3b, 3d are connected to each other in common, whereby other noise components due to acceleration can be removed with high performance. Further, an angular velocity detector inputs detection signals from the detection electrodes 3a, 3b and 3c, 3d, respectively, and uses resonance driving frequency as a reference clock, and performs digital signal processes in synchronism with vibrations of the angular velocity sensor element with respect to detection signals, and removes the same phase portion being noise signals, and correctly detects an angular velocity to be detected by phase demodulation. |
