FIELD EMISSION TYPE COLD CATHODE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a field emission type cold cathode device in which the sustaining of discharge is prevented. SOLUTION: A field emission type cold cathode device is provided with a right below cone region surrounding insulation layer 3 formed so as to surround n-type silicon 1 regions respectively right below plural emitter cones 2 having sharp tip shapes inside an n-type silicon substrate 1. An insulator layer 4 having such opening portions as surrounding respective emitter cones 2 is provided on the n-type silicon substrate 1. Such gate electrodes 5 having plural openings as extracting electrons emitted from the respective emitter cones 2 are provided on the insulator layer 4.