GLASS SUBSTRATE INSPECTING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To enable detection with higher reliability of fine glass dusts left on a glass substrate which has passed a cutting process by detecting scattered light among inspecting light irradiated onto the glass substrate at a low angle from a linear irradiation beam. SOLUTION: A glass substrate S is conveyed by a conveying section 2 at a fixed speed and a linear irradiation light source 3 linearly irradiates the glass substrate S with inspecting light at a low angleθ1 . A photodetector 4 detects the inspecting light scattered as irradiated onto fine glass dusts existing on the glass substrate S among the linear inspecting lights irradiated onto the glass substrate S. An inspection processing section 5 electrically processes an image signal from the photo detector 4 to detect a location where the fine glass dusts exist as that where the scattered light is generated exceeding a specified value from an intensity distribution of the scattered light. The inspection processing section 5 herein used is an apparatus provided with a module for differentiation processing, convolution, statistic processing or the like and the existing position of the fine glass dusts detected is shown on an image display device 6.