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发明名称
A modified tungsten-plug contact process
摘要
申请公布号
SG46751(A1)
申请公布日期
1998.02.20
申请号
SG19960010770
申请日期
1996.09.19
申请人
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD
发明人
LIAW JHON-JHY;LEE JIN-YUAN;TSENG MING-CHANG
分类号
H01L21/768;(IPC1-7):H01L29/00
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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