| 摘要 |
PROBLEM TO BE SOLVED: To regulate the displacement of a mass part through a double structure. SOLUTION: The acceleration sensor comprises a first board 1 comprising a mass part 10 including a central mass part 11 and a plurality of peripheral mass parts 13, a supporting part 15 arranged on the periphery of the mass part 10, and a flexible beam part 12 for coupling the mass part 10 and the supporting part 15 formed integrally, and a second board 4 comprising a weight part 46 disposed in the center, and a base 45 arranged on the periphery of the weight part 46 while being separated therefrom through grooves 41, 42, wherein the central mass part 11 is bonded to the weight part 46 while the supporting part 15 is bonded to the base 45 and integrated. A recess 44 is made at the end of the upper surface continuous to the groove 42 in the weight part 46 while a recess 43 is made at the end of the upper surface continuous to the groove 41 in the base 45. Lower surface of the supporting part 15 is arranged above the recess 44 in the weight part while being spaced apart therefrom and the lower surface of the peripheral mass part 13 is arranged above the recess 43 in the base 45 while being spaced apart therefrom. |
