| 摘要 |
PROBLEM TO BE SOLVED: To transfer a wafer within an allowable range by setting dispersion of the stopping position of a wafer transfer arm within an allowable range. SOLUTION: The wafer transfer system comprises an arm 12 for transferring a wafer 11 while holding, a first positioning guide 12c secured to the transfer arm 12, a section 13 for receiving a positioned wafer 11 from the transfer arm 12, and an independent second positioning guide 14. The wafer 11 is transferred at a position where the first and second positioning guides 12c, 14 are fitted loosely. |
