DEVICE AND METHOD FOR MEASURING PLASMA ELECTRIC POTENTIAL,申请号JP19960217728-传众专利搜索

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发明名称	DEVICE AND METHOD FOR MEASURING PLASMA ELECTRIC POTENTIAL
摘要
申请公布号	JPH1050497(A)	申请公布日期	1998.02.20
申请号	JP19960217728	申请日期	1996.07.30
申请人	TOKYO ELECTRON LTD	发明人	KOSHIMIZU CHISHIO
分类号	G01R29/00;C23C16/50;C23F4/00;H01L21/302;H01L21/3065;H05H1/00;H05H1/46;(IPC1-7):H05H1/46;H01L21/306	主分类号	G01R29/00
代理机构		代理人
主权项
地址

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