| 摘要 |
<p>Thin film actuated mirror arrays (AMA) in an optical projection system and a method for manufacturing the same are disclosed. The thin film (AMA) has a substrate having an electrical wiring and a connecting terminal, an actuator (170) formed on the substrate, and a reflecting member (190) formed on the actuator. The actuator (170) has a plurality of actuating portions in which adjacent actuating portions (171, 172) are actuated in opponent directions one after another, so the reflecting member (190) installed on the actuator has large tilting angle. Therefore, the light efficiency of the light reflected by reflecting member (190) increases and the contrast of the picture projected onto a screen also increases. Furthermore, the distance between a light source and the screen is wider because the tilting angle of the reflecting member (190) is bigger.</p> |
