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发明名称
Epitaxie zur Züchtung von Verbindunghalbleitern und InP Substraten für das Epitaxiezüchten
摘要
申请公布号
DE69501444(D1)
申请公布日期
1998.02.19
申请号
DE1995601444
申请日期
1995.09.06
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP
发明人
OIDA, KAZUHIKO, C/O ITAMI WORKS OF SUMITOMO, ITAMI-SHI, HYOGO, JP;NAKAI, RYUSUKE, C/O ITAMI WORKS OF SUMITOM, ITAMI-SHI, HYOGO, JP
分类号
C30B25/18;C30B23/02;C30B25/02;C30B29/40;H01L21/205;(IPC1-7):C30B25/18
主分类号
C30B25/18
代理机构
代理人
主权项
地址
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